NASA Spinoff Database: Analytical Instrument

NASA Center: Jet Propulsion Laboratory
Public Release Year: 1994
Reference Number: JPL-SO-148
Category: Computer Technology
Origin: Research Instrument Invented By Scientists at JPL's Center for Microelectronics

Abstract:
BEEM (Ballistic Electron Emission Microscopy) was invented at Jet Propulsion Laboratory's Center for Microelectronics Technology. It is a significant research instrument for microelectronics research because it is able to image underlying layers or interfaces of surface structures. A tiny current is injected into a metal layer and the electrons travel ballistically through the metal allowing the researcher to study the operation and performance of a structure. Other advantages include nondestructive imaging of barrier heights and electronic characterization of devices, as well as the potential to observe processes like molecular beam epitaxy (crystal growth) in situ.

Full Article:
http://hdl.handle.net/hdl:2060/20020080278

Page Number in Published book: 98
Manufacturer: TECHNICAL MARKETING PROGRAMS, INC.
Website:

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