NASA Spinoff Database: Analytical Instrument

NASA Center: Jet Propulsion Laboratory
Public Release Year: 1994
Reference Number: JPL-SO-148
Category: Computer Technology
Origin: Research Instrument Invented By Scientists at JPL's Center for Microelectronics

BEEM (Ballistic Electron Emission Microscopy) was invented at Jet Propulsion Laboratory's Center for Microelectronics Technology. It is a significant research instrument for microelectronics research because it is able to image underlying layers or interfaces of surface structures. A tiny current is injected into a metal layer and the electrons travel ballistically through the metal allowing the researcher to study the operation and performance of a structure. Other advantages include nondestructive imaging of barrier heights and electronic characterization of devices, as well as the potential to observe processes like molecular beam epitaxy (crystal growth) in situ.

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Page Number in Published book: 98

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