Pressure Relief Valve
Originally published in 1985
Body
Sputtering" is the process of applying filmlike metal coatings onto a surface by bombarding the coating material with electrocharged ions. This causes the material to disintegrate and relocate on the substrate an atom layer at a time. The process allows a variety of coating materials to be deposited on various surfaces. Deposition Technology Inc. uses "sputtering" for window films packaging materials etc. Valves installed on two vacuum chambers which are part of DTI's system were developed by Lewis Research Center and detailed in Tech Briefs. The valve protects the environment and frees the operator from monitoring the chamber venting."
Full article: http://hdl.handle.net/hdl:2060/20020090871
Abstract
Sputtering" is the process of applying filmlike metal coatings onto a surface by bombarding the coating material with electrocharged ions. This causes the material to disintegrate and relocate on the substrate an atom layer at a time. The process allows a variety of coating materials to be deposited on various surfaces. Deposition Technology Inc. uses "sputtering" for window films packaging materials etc. Valves installed on two vacuum chambers which are part of DTI's system were developed by Lewis Research Center and detailed in Tech Briefs. The valve protects the environment and frees the operator from monitoring the chamber venting."
Pressure Relief Valve
Pressure Relief Valve
